Probe Machine是执行包含在Wafer的Chip的Test的设备,特别是可进行Wafer Level Test,可测试所有4inch•6inch Wafer的高互换性 。 在Loading Cassette上 Loading后的Wafer被Loading到Aligner以后, 在Aligner上排列Wafer的XYZθ后移送到Top Vision, Check First chip, 识别First chip后移送到 Probe Zone,执行 Probing test 。 从Wafer Loading Cassette上Unloading后姿势Align及直到Loading到Probing test • Unloading Wafer Cassette为止优化Wafer的移动。 产品具有大大减少Wafer的Probing test所需时间的独有的特点 。 采用产品从测量位置到视觉补偿在5微米以内的方法,大大提高了可靠性,通过4个调节螺钉调节Card Holder Unit的 Flatness。 |
Target PKG | • Wafer Level SMD and others [ ex : 0705 ~ 1612 others ] |
Index Time | • 220msec Test Time 60ms included (Material Change Time excluded) |
Insert Type | • 6inch SUS Ring |
Cassette | • Elevator Z Axis : Servo Motion • Z Axis Mechanism : Ball Screw + LM Guide • Magazine : User provided |
Transfer | • Y Axis : Servo Motion • Y Axis Mechanism : Belt & Pulley + LM Guide • Gripper Actuator : Cylinder • Product Presence Check Sensor : Photo Sensor • Over-load Sensor is applied for and reverse movement to secure safety |
Worker Stage | • X-Y Axis : Linear Motion Resolution : 1㎛ • Z Axis : Servo Motion Resolution : 1㎛ • Z Axis Mechanism : Ball Screw + Guide Post • θ Axis : DD Motion Resolution : 0.02drgee • Gripper Actuator : Dual Cylinder + Manual load control • Work Base Earth with Ring Frame to secure reliability • Work Base : SUS Pad + Au plating Flatness±5㎛ Vacuum Hole Size 0.1mm, Pitch 5mm • Wafer Ring Chuck Source : Vacuum Type |
#1 Top Vision | • 1’st Chip Check(9 Chip Algorithm) and Theta adjustment Do not check Map Matching additionally : improve production efficiency • Resolution : VGA |
#2 Top Vision (Positioned on Measuring spot) | • Check product presence and positional information • Pixel Size : 4.5㎛ (Based on x 1) • Light : Strobe Control • Lens : x0.5 ~ x3 Zoom Applied |
Probe | • Measuring position degree : within ±5㎛ Secure reliability by compensating product on measuring position with Vision Card Holder Unit Flatness adjustable: Adjust Bolt 4개 Applied |
Machine Dimension | • 1,100mm(W)*1,000mm(L)*1,700mm(H) Worker Height : 980mm |
Weight | • About 1,200 kg |
Control | • Main Control : PC, Display : 17 inch Color Touch Panel • User Data Management : Production & Faulty, Hours of Operation others... Count |
Utility | • Electric : Single phase AC 200~230[V], 50/60 [Hz] • Air : 4 ~ 7 ㎏ /㎠ |
联系方式:0512-52998000 | 18013591616
邮 箱:howard@botechs.com | echo@botechs.com
地 址:苏州高新区旺米街89号10幢南侧1-4层
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技术支持:易动力网络