B/G Laminator Machine是Grinding Wafer的反面,在减少Wafer厚度的同时,为防止Device在Wafer的正面产生的损伤, 用保护膜覆盖Wafer的正面,剪切并切除Wafer外围凸出的保护膜的设备。 |
Target PKG | • 4inch Wafer only |
Index Time | • UPH 40sheet (Material Change Time excluded ex: Magazine, Film others...) |
Insert Type | • Wafer : Magazine Type • Mount Film : Roll To Roll • De-Tape Film : Roll To Roll |
Loader | • WISOL only Magazine Applied • 4inch Wafer only • Product Presence Check Sensor : Sensor |
Robot | • Mechanical structure type : cylindrical coordinate type, control axis : 3axis • Z-Axis Stroke : 200mm • repeatability : within ±0.1mm • Wafer Maintenance : Vacuum Adhesion • Wafer Detection : Vacuum Sensor • Chuck Material : Ceramic or User specified |
UV Lamp | • Area Type UV LED • Wavelength selectable : 365, 385, 395, 405㎚ • Equipped with overvoltage, overcurrent, and overload protection protection circuit |
Aligner | • X-Theta Axis : Servo Motion • Positioning accuracy : Within ±1mm of the center • Sensor : Limited Reflective Fiber Sensor Fiber Sensor |
Ring Loader | • Z Axis : Servo Motion • Mechanism : Ball Screw + LM Guide • Loads quantity : 100sheets • Empty Check Function applied |
Loader (Mount Film) | • Supply Actuator : AC Motor • Roll Fixture : Clip • Film Supply Stopper : Linear Cylinder • Film Tension Maintenance : Linear Cylinder • Amendment Paper Collecting Actuator : AC Motor + Torque Motor |
Feeder (Mount Film) | • Feeding Y Axis : Servo Motion • Mechanism : Ball Screw + LM Guide • Gripper Actuator : Linear Air Cylinder • Gripper Chuck Material : Urethane Series • Roller Feeding Axis : Servo Motion • Mechanism : Ball Screw + LM Guide • Roller Actuator : Linear Air Cylinder • Roller Material : Silicon Series • Roller Temperature range : Normal temperature ~ 60℃ |
Mounter Stage (Mount Film) | • Z Axis : Servo Motion • Mechanism : Ball Screw + LM Guide • Film Maintenance : Vacuum Adhesion • Film Detection : Vacuum Sensor • Chuck Material : Aluminum • Chuck Temperature range : Normal temperature ~ 80℃ • Cutting method : Mechanical type • Cutter Z Axis : Linear Air Cylinder • Cutter Theta Axis : Servo Motion • Mechanism : Pulley + Belt • Cutter Material : Tool steel series • Cutter Temperature range : Normal temperature ~ 80℃ |
Unloader (Mount Film) | • Supply Actuator : AC Motor + Torque Motor • Roll Fixture : Clip • Film Tension Maintenance : Linear Cylinder |
Loader (De-Tape Film) | • Supply Actuator : AC Motor • Roll Fixture : Clip • Film Supply Stopper : Linear Cylinder • Film Tension Maintenance : Linear Cylinder • Amendment Paper Collecting Actuator : AC Motor + Torque Motor |
Feeder (De-Tape Film) | • Feeding Y Axis : Servo Motion • Mechanism : Ball Screw + LM Guide • Gripper Actuator : Linear Air Cylinder • Gripper Chuck Material : Urethane Series • Roller Feeding Axis : Servo Motion • Mechanism : Ball Screw + LM Guide • Roller Actuator : Linear Air Cylinder • Roller Material : Silicon Series • Roller Temperature range : Normal temperature ~ 60℃ |
De-Tape Stage (De-Tape Film) | • X-Z Axis : Servo Motion • Mechanism : Ball Screw + LM Guide • Film Maintenance : Vacuum Adhesion • Film Detection : Vacuum Sensor • Chuck Material : Aluminum |
Unloader (De-Tape Film) | • Supply Actuator : AC Motor + Torque Motor • Roll Fixture : Clip • Film Tension Maintenance : Linear Cylinder |
Transfer | • Y Axis : Servo Motion • Y Axis Mechanism : Belt & Pulley + LM Guide • Gripper Actuator : Cylinder • Product Presence Check Sensor : Photo Sensor • Over-load Sensor is applied for and reverse movement to secure safety |
Barcode Printer | • User specified Applied |
Unloader (Wafer + Ring Magazine) | • Elevator Z Axis : Servo Motion • Z Axis Mechanism : Ball Screw + LM Guide • Magazine : User provided • Need to discuss the loading quantity |
Packing Type | • Wafer + Ring : Magazine Type • Mount & De-Tape Film : Roll To Roll |
Machine Dimension | • 2,300mm(W)*1,250mm(L)*1,700mm(H) Worker Height : 980mm |
Weight | • About 1,800 kg |
Control | • Main Control : PC, Display : 17 inch Color Touch Panel • User Data Management : Production & Faulty, Hours of Operation others... Count |
Utility | • Electric : 2Phase AC 200~230V, 50/60Hz • Air : 4 ~ 7 ㎏/㎠ |
联系方式:0512-52998000 | 18013591616
邮 箱:howard@botechs.com | echo@botechs.com
地 址:苏州高新区旺米街89号10幢南侧1-4层
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技术支持:易动力网络