Lift-off Machine是 为了去除在保护Wafer进行单位工程的过程中形成的(wall),在覆盖(wall)的Plating工程中所形成的Plating layer上的Scale的设备,可以利用黏胶带快捷地去除Plating layer上形成的Scale的设备。 |
Target PKG | • 4inch Wafer only |
Index Time | • UPH 35sheet (Material Change Time excluded ex: Magazine, Film others...) |
Insert Type | • Wafer : Magazine Type • Film : Roll To Roll |
Loader | • WISOL only Magazine Applied • 4inch Wafer only • Product Presence Check Sensor : Sensor |
Robot | • Mechanical structure type : cylindrical coordinate type, control axis : 3axis • Z-Axis Stroke : 200mm • repeatability : within ±0.1mm • Wafer Maintenance : Vacuum Adhesion • Wafer Detection : Vacuum Sensor • Chuck Material : Ceramic or User specified |
Aligner | • X-Theta Axis : Servo Motion • Positioning accuracy : Within ±1mm of the center • Sensor : Limited Reflective Fiber Sensor Fiber Sensor |
Loader(Film) | • Supply Actuator : AC Motor • Roll Fixture : Clip • Film Supply Stopper : Linear Cylinder• Film Tension Maintenance : Linear Cylinder • Amendment Paper Collecting Actuator : AC Motor + Torque Motor |
Feeder (Film) | • Feeding Y Axis : Servo Motion • Mechanism : Ball Screw + LM Guide • Gripper Actuator : Linear Air Cylinder • Gripper Chuck Material : Urethane Series • Roller Feeding Axis : Servo Motion • Mechanism : Ball Screw + LM Guide • Roller Actuator : Linear Air Cylinder • Roller Material : Silicon Series • Roller Temperature range : Normal temperature ~ 60℃ |
Work Stage (De-Tape) | • X-Z Axis : Servo Motion • Mechanism : Ball Screw + LM Guide • Film Maintenance : Vacuum Adhesion • Film Detection : Vacuum Sensor • Chuck Material : Aluminum • Chuck Temperature range : Normal temperature ~ 80℃ |
Rotate & Align | • Position : 2 Zone • X-Y Axis : Servo Motion • Theta Axis : Servo Motion • Product direction adjustment accuracy : ±20㎛ |
Unloader (Film) | • Supply Actuator : AC Motor + Torque Motor • Roll Fixture : Clip • Film Tension Maintenance : Linear Cylinder |
Packing Type | • Wafer : Magazine Type • Film : Roll To Roll |
Machine Dimension | • 1,200mm(W)*1,350mm(L)*1,800mm(H) Worker Height : 980mm |
Weight | • About 1,300 kg |
Control | • Main Control : PC, Display : 17 inch Color Touch Panel • User Data Management : Production & Faulty, Hours of Operation others... Count |
Utility | • Electric : Single Phase AC 200~230[V], 50/60 [Hz] • Air : 4 ~ 7 ㎏ /㎠ |
联系方式:0512-52998000 | 18013591616
邮 箱:howard@botechs.com | echo@botechs.com
地 址:苏州高新区旺米街89号10幢南侧1-4层
版权由苏州搏技光电有限公司所有苏ICP备15022963号-1
技术支持:易动力网络